2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, California, USA Contributor(s): Engelhardt, Manfred (Other) |
|
ISBN: 096515775X ISBN-13: 9780965157759 Publisher: Northern California Chapter of the American V OUR PRICE: $133.00 Product Type: Hardcover - Other Formats Published: January 2001 |
Additional Information |
BISAC Categories: - Technology & Engineering | Electronics - Semiconductors |
Dewey: 621.381 |
LCCN: 2001273522 |
Series: IEEE Conference Proceedings |
Physical Information: 5 pages |
Descriptions, Reviews, Etc. |
Publisher Description: This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects. |