| 2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, California, USA Contributor(s): Engelhardt, Manfred (Other) |
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ISBN: 096515775X ISBN-13: 9780965157759 Publisher: Northern California Chapter of the American V OUR PRICE: $133.00 Product Type: Hardcover - Other Formats Published: January 2001 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Semiconductors |
| Dewey: 621.381 |
| LCCN: 2001273522 |
| Series: IEEE Conference Proceedings |
| Physical Information: 5 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects. |