| Computational Lithography Contributor(s): Ma, Xu (Author), Arce, Gonzalo R. (Author) |
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ISBN: 047059697X ISBN-13: 9780470596975 Publisher: Wiley OUR PRICE: $130.10 Product Type: Hardcover - Other Formats Published: September 2010 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Semiconductors |
| Dewey: 621.381 |
| LCCN: 2009049250 |
| Series: Wiley Series in Pure and Applied Optics |
| Physical Information: 0.7" H x 6.1" W x 9.3" (1.14 lbs) 256 pages |