| Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization: Volume 46 Contributor(s): Willardson, R. K. (Editor), Weber, Eicke R. (Editor), Christofides, Constantinos |
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ISBN: 0127521461 ISBN-13: 9780127521466 Publisher: Academic Press OUR PRICE: $257.40 Product Type: Hardcover - Other Formats Published: May 1997 Annotation: Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer after high temperature annealing. The editors of this volume and Volume 45 focus on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented. Key Features * Provides basic knowledge of ion implantation-induced defects * Focuses on physical mechanisms of defect annealing * Utilizes electrical, physical, and optical characterization tools for processed semiconductors * Provides the basis for understanding the problems caused by the defects generated by implantation and the means for their characterization and elimination |
| Additional Information |
| BISAC Categories: - Science | Physics - General - Technology & Engineering | Electronics - Semiconductors - Technology & Engineering | Electrical |
| Dewey: 621.381 |
| Series: Semiconductors and Semimetals |
| Physical Information: 0.75" H x 6" W x 9" (1.36 lbs) 316 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer after high temperature annealing. The editors of this volume and Volume 45 focus on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented. |