| A User's Guide to Ellipsometry Contributor(s): Tompkins, Harland G. (Author) |
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ISBN: 0486450287 ISBN-13: 9780486450285 Publisher: Dover Publications OUR PRICE: $16.10 Product Type: Paperback - Other Formats Published: July 2006 Annotation: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition. |
| Additional Information |
| BISAC Categories: - Science | Nanoscience - Technology & Engineering | Electrical - Science | Physics - Optics & Light |
| Dewey: 620.112 |
| LCCN: 2006040253 |
| Series: Dover Civil and Mechanical Engineering |
| Physical Information: 0.56" H x 5.64" W x 8.5" (0.66 lbs) 288 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references. |