| Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices 1998 Edition Contributor(s): Garfunkel, Eric (Editor), Gusev, Evgeni (Editor), Vul', Alexander (Editor) |
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ISBN: 0792350073 ISBN-13: 9780792350071 Publisher: Springer OUR PRICE: $161.49 Product Type: Hardcover - Other Formats Published: March 1998 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Semiconductors - Technology & Engineering | Electrical |
| Dewey: 621.381 |
| LCCN: 98004692 |
| Series: NATO Science Partnership Subseries: 3 |
| Physical Information: 1.13" H x 6.14" W x 9.21" (1.99 lbs) 507 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology. |