Micro Electro Mechanical System Design Contributor(s): Allen, James J. (Author) |
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ISBN: 0824758242 ISBN-13: 9780824758240 Publisher: CRC Press OUR PRICE: $256.50 Product Type: Hardcover - Other Formats Published: July 2005 Annotation: Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What are the packaging and assembly requirements? |
Additional Information |
BISAC Categories: - Technology & Engineering | Mechanical - Technology & Engineering | Electronics - Microelectronics - Technology & Engineering | Nanotechnology & Mems |
Dewey: 621 |
LCCN: 2005041771 |
Physical Information: 1.2" H x 6.1" W x 9.1" (1.75 lbs) 496 pages |
Descriptions, Reviews, Etc. |
Publisher Description: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development: |