| Flash Lamp Annealing: From Basics to Applications 2019 Edition Contributor(s): Rebohle, Lars (Author), Prucnal, Slawomir (Author), Reichel, Denise (Author) |
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ISBN: 3030232980 ISBN-13: 9783030232986 Publisher: Springer OUR PRICE: $132.99 Product Type: Hardcover - Other Formats Published: August 2019 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Semiconductors - Technology & Engineering | Materials Science - Electronic Materials - Technology & Engineering | Manufacturing |
| Dewey: 537.622 |
| Series: Springer Materials Science |
| Physical Information: 0.75" H x 6.14" W x 9.21" (1.34 lbs) 288 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users. |
