| Chemistry of Atomic Layer Deposition Contributor(s): Barry, Seán Thomas (Author) |
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ISBN: 3110712512 ISBN-13: 9783110712513 Publisher: de Gruyter OUR PRICE: $78.29 Product Type: Paperback - Other Formats Published: November 2021 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Materials Science - Metals & Alloys - Science | Chemistry - Inorganic - Technology & Engineering | Electronics - Microelectronics |
| Physical Information: 0.24" H x 6.69" W x 9.61" (0.43 lbs) 113 pages |