| Nanopositioning Technologies: Fundamentals and Applications Softcover Repri Edition Contributor(s): Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor) |
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ISBN: 3319795392 ISBN-13: 9783319795393 Publisher: Springer OUR PRICE: $104.49 Product Type: Paperback - Other Formats Published: March 2018 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Automation - Technology & Engineering | Nanotechnology & Mems - Technology & Engineering | Electronics - General |
| Dewey: 620.004 |
| Physical Information: 0.85" H x 6.14" W x 9.21" (1.28 lbs) 409 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries. |
