Epitaxy: Physical Principles and Technical Implementation Contributor(s): Herman, Marian A. (Author), Richter, W. (Author), Sitter, Helmut (Author) |
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ISBN: 364208737X ISBN-13: 9783642087370 Publisher: Springer OUR PRICE: $208.99 Product Type: Paperback - Other Formats Published: December 2010 |
Additional Information |
BISAC Categories: - Science | Physics - Crystallography - Technology & Engineering | Materials Science - Electronic Materials - Technology & Engineering | Electrical |
Dewey: 621.381 |
Series: Springer Materials Science |
Physical Information: 1.1" H x 6.14" W x 9.21" (1.66 lbs) 525 pages |
Descriptions, Reviews, Etc. |
Publisher Description: Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.
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