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Design and Manufacturing of Active Microsystems
Contributor(s): Büttgenbach, Stephanus (Editor), Burisch, Arne (Editor), Hesselbach, Jürgen (Editor)
ISBN: 3642129021     ISBN-13: 9783642129025
Publisher: Springer
OUR PRICE:   $161.49  
Product Type: Hardcover - Other Formats
Published: March 2011
Qty:
Additional Information
BISAC Categories:
- Technology & Engineering | Nanotechnology & Mems
- Technology & Engineering | Mechanical
- Technology & Engineering | Industrial Engineering
Dewey: 621.381
Series: Microtechnology and Mems (Hardcover)
Physical Information: 1.2" H x 6.1" W x 9.2" (1.65 lbs) 444 pages
 
Descriptions, Reviews, Etc.
Publisher Description:
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.