| Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fun Softcover Repri Edition Contributor(s): Ruge, Ingolf (Editor), Graul, J. (Editor) |
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ISBN: 3642806627 ISBN-13: 9783642806629 Publisher: Springer OUR PRICE: $104.49 Product Type: Paperback - Other Formats Published: December 2011 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Semiconductors - Medical - Science | Physics - Condensed Matter |
| Dewey: 621.381 |
| Physical Information: 1.07" H x 6.69" W x 9.61" (1.85 lbs) 508 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: In recent years great progress has been made in the field of ion implantation, particularly with respect to applications in semiconductors. It would be impos- sible not to note the growing interest in this field, both by research groups and those directly concerned with production of devices. Furthermore, as several papers have pointed out, ion implantation and its associated technologies promise exciting advances in the development of new kinds of devices and provide power- ful new tools for materials investigations. It was, therefore, appropriate to arrange the II. International Conference on Ion Implantation in Semiconductors within the rather short time of one year since the first conference was held in 1970 in Thousand Oaks, California. Although ori- ginally planned on a small scale with a very limited number of participants, more than two hundred scientists from 15 countries participated in the Conference which was held May 24 - 28, 1971 at the Congress Center in Garmisch-Partenkirchen. This volume contains the papers that were presented at the Conference. Due to the tremendous volume of research presented, publication here of all the works in full detail was not possible. Many authors therefore graciously agreed to submit abbreviated versions of their papers. |
