Topics in Growth and Device Processing of III-V Semiconductors Contributor(s): Abernathy, Cammy R. (Author), Sah, Chih Tang (Author), Ren, F. (Author) |
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ISBN: 9810218842 ISBN-13: 9789810218843 Publisher: World Scientific Publishing Company OUR PRICE: $118.75 Product Type: Hardcover Published: November 1996 |
Additional Information |
BISAC Categories: - Technology & Engineering | Electrical - Science | Physics - Condensed Matter - Technology & Engineering | Electronics - Semiconductors |
Dewey: 660.297 |
Series: International Advances in Solid State Electronics and Technology |
Physical Information: 1.3" H x 6.2" W x 8.9" (1.80 lbs) 560 pages |
Descriptions, Reviews, Etc. |
Publisher Description: This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems. |