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MEMS Mechanical Sensors
Contributor(s): Beeby, Stephen (Author)
ISBN: 1580535364     ISBN-13: 9781580535366
Publisher: Artech House Publishers
OUR PRICE:   $111.15  
Product Type: Hardcover
Published: April 2004
Qty:
Annotation: Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
Additional Information
BISAC Categories:
- Technology & Engineering | Technical & Manufacturing Industries & Trades
Dewey: 681.2
LCCN: 2004046158
Series: Mems--Microelectromechanical Systems Series
Physical Information: 0.77" H x 7.26" W x 10.38" (1.42 lbs) 269 pages
 
Descriptions, Reviews, Etc.
Publisher Description:
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.