MEMS Mechanical Sensors Contributor(s): Beeby, Stephen (Author) |
|
ISBN: 1580535364 ISBN-13: 9781580535366 Publisher: Artech House Publishers OUR PRICE: $111.15 Product Type: Hardcover Published: April 2004 Annotation: Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors. |
Additional Information |
BISAC Categories: - Technology & Engineering | Technical & Manufacturing Industries & Trades |
Dewey: 681.2 |
LCCN: 2004046158 |
Series: Mems--Microelectromechanical Systems Series |
Physical Information: 0.77" H x 7.26" W x 10.38" (1.42 lbs) 269 pages |
Descriptions, Reviews, Etc. |
Publisher Description: The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices. |