Microfabrication Lithography Contributor(s): Gordinier, Roy (Author) |
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ISBN: 1523483857 ISBN-13: 9781523483853 Publisher: Createspace Independent Publishing Platform OUR PRICE: $76.00 Product Type: Paperback Published: January 2016 |
Additional Information |
BISAC Categories: - Science | Nanoscience |
Physical Information: 0.54" H x 8.5" W x 11.02" (1.33 lbs) 258 pages |
Descriptions, Reviews, Etc. |
Publisher Description: All about lithography techniques used in microfabrication: semiconductor device fabrication, nanotechnology, etc |