| Fabrication Engineering at the Micro- And Nanoscale Contributor(s): Campbell, Stephen A. (Author) |
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ISBN: 0199861226 ISBN-13: 9780199861224 Publisher: Oxford University Press, USA OUR PRICE: $227.69 Product Type: Paperback Published: November 2012 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Microelectronics - Technology & Engineering | Engineering (general) - Technology & Engineering | Electronics - Semiconductors |
| Dewey: 621.381 |
| LCCN: 2012037066 |
| Series: Oxford Series in Electrical and Computer Engineering (Paperback) |
| Physical Information: 1.03" H x 7.55" W x 9.29" (2.37 lbs) 688 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes. |
