| Novel Silicon Based Technologies Contributor(s): ot AvailableTO Advanced Study Institute on Novel S (Author), Levy, Ra (Editor), Levy, R. a. (Editor) |
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ISBN: 0792311124 ISBN-13: 9780792311126 Publisher: Springer OUR PRICE: $94.05 Product Type: Hardcover Published: January 1991 |
| Additional Information |
| BISAC Categories: - Technology & Engineering | Electronics - Circuits - General - Technology & Engineering | Materials Science - General - Technology & Engineering | Optics |
| Dewey: 621.381 |
| LCCN: 90-26768 |
| Series: NATO Science Series: E: |
| Physical Information: 0.88" H x 6.44" W x 9.56" (1.34 lbs) 292 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for |