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Chemical Vapor Deposition: Principles and Applications
Contributor(s): Hitchman, M. L. (Editor), Jensen, K. F. (Editor)
ISBN: 0123496705     ISBN-13: 9780123496706
Publisher: Academic Press
OUR PRICE:   $484.00  
Product Type: Hardcover - Other Formats
Published: April 1993
* Not available - Not in print at this time *Annotation: This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles.
Additional Information
BISAC Categories:
- Technology & Engineering | Nanotechnology & Mems
- Technology & Engineering | Chemical & Biochemical
- Science | Chemistry - Industrial & Technical
Dewey: 620.44
LCCN: 93125773
Physical Information: 1.44" H x 6.14" W x 9.21" (2.49 lbs) 677 pages